Suspension Plasma Spray for dense Y2O3 (yttria) coatings
- Published Date
Properties
Suspension plasma spray delivers fine submicron particles to the Axial III high energy plasma torch to produce unique, dense coatings that are especially useful in erosion and corrosion resistant applications.
Application
High purity materials of sintered, bulk Y2O3 or anodized aluminum are being used as erosion resistant and high electric strength liners for plasma etching chambers in the semiconductor industry. Maintenance cycles require replacement when the liners are substantially worn and vary with liner composition. Yttria is the preferred liner material due to its superior anti-erosion properties and lower maintenance frequencies.
Problem
The high cost and brittleness of sintered, bulk Y2O3 are prohibitive to most industrial applications.
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